SPL10 TSVAC Scroll Vacuum Pump, 550W 10m³/h ≤0.3mbar Oil-Free Dry Pump
The SPL10 TSVAC scroll vacuum pump is a portable, oil-free dry vacuum pump designed for semiconductor and precision industrial applications.
- 10 m³/h Flow Rate
- 2 Pa Max Pressure
- 550 W Power Rating
Need help applying this product? Our engineers can help select the right equipment and design a system around your requirements. Request a quote or discuss your application with us.
Need help choosing? Send us the part number or your operating data — talk to an engineer or see full specifications.
- Fast dispatchAustralia & worldwide
- Technical supportTalk to an engineer
- 12 MonthsWarranty
Product Overview
The SPL10 TSVAC scroll vacuum pump is a portable, oil-free dry vacuum pump designed for semiconductor and precision industrial applications. Utilizing advanced scroll technology, it delivers clean vacuum performance without contamination, making it ideal for sensitive environments.
With a pumping speed of 10 m³/h and low noise operation, this pump ensures efficient and reliable performance in compact systems.
Technical Specifications
| Specification | Value |
|---|---|
| Product Name | Scroll Vacuum Pump |
| Model | SPL10 |
| Brand | TSVAC |
| Pump Type | Vacuum Pump |
| Structure | Scroll (Dry Oil-Free) |
| Pressure | Vacuum |
| Ultimate Pressure | ≤0.3 mbar |
| Max Pressure | 2 Pa |
| Flow Rate | 10 m³/h |
| Speed | 1500 RPM |
| Motor Type | Inverter Motor |
| Power Source | Electric |
| Power Rating | 550 W |
| Voltage | 100 – 240V |
| Pump Body Material | Aluminum |
| Impeller Material | Glass Fiber Reinforced Plastic |
| Connection Type | Direct Coupling |
| Outlet Size | KF25 |
| Discharge Size | 1-1/2 inch |
| Cooling Method | Air Cooling |
| Noise Level | 55 dB(A) |
| Cable Length | 1.5 – 2 m |
| Applicable Temperature | 5 – 80°C |
| Filter Material | Polyester + Non-woven Fabric |
| Certification | CE / ISO9001 |
| Dimensions | 442 × 278 × 308 mm |
| Warranty | 12 Months |
Key Features
- Oil-free scroll vacuum technology
- Pumping speed of 10 m³/h
- Ultimate vacuum ≤0.3 mbar
- Low noise operation at 55 dB
- Compact and portable design
- Suitable for cleanroom environments
Typical Applications
- Semiconductor manufacturing
- Laboratory systems
- Precision vacuum equipment
- Analytical instruments
- Industrial processing
- Research and development
Shipping & Support
- Fast dispatch - Australia & World wide shipping
- Technical assistance available
- 12-month warranty
// Your history
Recently viewed
How do I find the right part for my system?
Three options. Search by part number if you have the OEM code from Parker, Danfoss, Linde, Kawasaki, Kayaba or Grundfos — our search recognises both manufacturer codes and aftermarket cross-references. Browse by category if you know the component type (pumps, valves, cylinders, etc.). Or send a spec sheet to our engineering desk and we'll cross-reference against our 3,000+ SKU catalogue within one business day.
Can you help me size a pump or valve for my application?
Yes — sizing support is included with every order. Send us your operating pressure, flow rate, viscosity, drive speed and duty cycle, and our engineers will recommend a suitable component from our catalogue with full datasheets. We don't custom-build parts ourselves, but we can spec the right OEM component for almost any standard industrial application.
Can you cross-reference a discontinued part?
Yes — cross-referencing is one of the things we do most. Send us the original part number (even if the manufacturer has dropped it) and our engineering desk will identify a current equivalent or compatible alternative. Cross-reference lookups are free and typically come back within 4 business hours.